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PLASMA CHAMBER 적용공정 BACKBONE CHAMBER수 PROESS ESC 비고
MAXIS200L OXIDE ETCH
POLY Si ETCH
NITRIDE ETCH
3,5족 화합물
NeoGENⅡ
NeoGEN
NeoS
3
1
1
FACE UP CERAMIC ESC 고온
CHAMBER
optional
4,6,8인치
MAXIS200LM_ RADIION200 METAL ETCH NeoGENⅡ
NeoGEN
3
1
FACE UP CERAMIC ESC SAW FILITER
MAXIS300LA PSS ETCH
GaN ETCH
1 FACE UP TRAY TYPE 4,6인치 LED
MAXIS880LDR PSS ETCH
ISO ETCH
NeoSYS 2 FACE DOWN TRAY TYPE 4,6인치 LED