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SEMICONDUCTOR
EQUIPMENT MANUFACTURING

Solutions

Gigalane specializes in plasma etcher & nano-imprinter manufacturing, and we are expanding our business based on proven excellence, consistently providing new solutions which are required in the Fourth Industrial Revolution and 5G era.

Solutions
Applications Memory Device
Logic Device
Discrete Device
Optical Device
Power & RF Device
Piezo Device
MEMS Sensor
TSV
Micro-Lens
Nano-Rod
WGP, Meta-pattern
Micro-Lens
Materials Poly-Si, SiO2,SiN, Al, Ti,
PR, PI, ...
GaN, GaAs. AlGaInP, InP,
AlN, SiC, LT, LN, Al,
Al2O3, SiO2, PR, PI...
Si, SiO2, Au, ... UV-resin
(High-RI, Hydrophilic...)
Products ICP Etcher
CCP Etcher
ICP Etcher
LED Etcher
Imprinter
DRIE Etcher
ICP Etcher
Imprinter
Imprinter
DRIE Etcher
ICP Etcher