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NANO IMPRINTER

The need for nano pattern in LED, OLED, LCD, BIO and other fields has increased tremendously, but industries other than semiconductor use photo lithography apparatus(KrF, ArF) which is not suitable for nano pattern production due to the equipment price, its quality, and productivity. Gigalane has developed Imprinter technology for many years, and offers a more refined service that automatically operates from Master molding to mold production and wafer imprinting. We also provide high quality and high productibility to our clients by consigning mold production and wafer imprinting in our own Clean Room for ultimate quality assurance.
Features
Provides various model lineup according to the imprint process
Imprinting
Process
Equipment Components
Full Automated
Imprinter
Mold
Imprinter
Auto
Imprinter
Manual
Imprinter
Gigalane
NANO-IMPRINTER
CITUS 6000FA
Fully automatic Imprinter
Overview
&
Performance
  • - 4" ~ 6" wafer imprinting
  • - Sub-100nm pattern resolution (Comparable with KrF scanner)
  • - Fully automatic operation : Master mold → mold → imprint, no operator intervention
  • - System integration, CITUS6000M(mold imprinter) + 6000R(wafer imprinter), in-line opertation
  • - Easy job change(flexible pattern change while operation)
    variours master wafers can be loaded without any delay or loss during master change
  • - Master mold loading : 12" ~ 8" wafer(cassette loading)
  • - Motion monitoring systerm : Coating, imprintinig, wafer delivery, film moving, on-line CAM record
  • - Resin mold repeatable (multiple usage) : Gaseous release coater in-line
  • - Lower CoC & CoO : cost of consumable, cost of ownership
  • - Very small footprint & simple process against photo stepper & wet(coating, developing)
  • - LED, Display, Other Electric Devices
    PSS, Micro Lens Array, 3D structure, slanted structure and nano~micro scale patterning
  • - Nomial monthly capacity : 30K/month, 60 wph(wafer per hour)
Gigalane
NANO-IMPRINTER
CITUS 6000M for Mold CITUS 6000R CITUS 6000SA
Mold Imprinter Auto Imprinter Manual Imprinter
Overview
  • - Master mold : 6inch ~ 12inch
  • - Resin mold roll production
  • - In-line Resin Coating
    (spray, ink jet, u-dispenser)
  • - Roll to Plate Contact imprint
  • - UV imprint(365nm)
  • - 4inch ~ 6inch
  • - LED, Display, Optical Devices
  • - Flexible Resin Mold(Roll to Roll)
  • - In-line Coater(spin coater)
  • - In-line Gaeous release treatment
  • - Vacuum assisted UV imprint(365nm)
  • - 4inch ~ 6inch, Manual type
  • - LED, Display, Optical Devices
  • - Flexible Resin Mold
  • - Coater/Demold optional
  • - Vacuum assisted UV imprint(365nm)
Performance
  • - 20nm Pattern Resolution
  • - Lower CoC & CoO
  • - Monthly Capa. : 30K
  • - Direct mold fabrication from
    master mold
  • - 20nm Pattern Resolution
  • - Lower CoC & CoO
  • - Small footprint against photo Litho
  • - Comparable to KrF, i-line Stepper
  • - Monthly Capa. : 30K
  • - 20nm Pattern Resolution
  • - Long life time sheet type mold
  • - Easy loading / unloading
  • - Easy job Change(Mold change)
  • - R&D for WGP, nPSS, Fine nano pattern
Process Data
Nano pattern :
WGP
Nano pattern :
pillar array
Micro pattern :
hole array
Micro lens array :
Si wafer
Micro trench line
Various imprinted
patterns
Product